By Srinivasan Sivaram

In early 1987 i used to be trying to strengthen a CVD-based tungsten procedure for Intel. At each step ofthe improvement, info that we have been amassing needed to be analyzed in mild of theories and hypotheses from books and papers in lots of unrelated topics. Thesesources have been so greatly varied that I got here to gain there has been no unifying therapy of CVD and its subprocesses. extra curiously, my colleagues within the have been from many disciplines (a floor chemist, a mechanical engineer, a geologist, and an electric engineer werein my group). to assist us comprehend the sector of CVD and its avid gamers, a few of us prepared the CVD user's staff of Northern California in 1988. the assumption for writing a booklet at the topic happened to me in the course of that point. I had already equipped my strategies for a direction I taught at San Jose kingdom collage. Later Van Nostrand agreed to put up my publication as a textual content meant for college students on the senior/first 12 months graduate point and for method engineers within the microelectronics undefined, This ebook isn't meant to be bibliographical, and it doesn't hide each new fabric being studied for chemical vapor deposition. nonetheless, it does current the foundations of CVD at a basic point whereas uniting them with the wishes of the microelectronics undefined.

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